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UV차단 금속막을 이용한 잔류층이 없는 UV-nanoimprint patterning에 관한 연구

Authors
안진호
Issue Date
20041105
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/73489
Place
인하대학교
Conference Name
2004년 한국재료학회
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서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers

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COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)
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