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Low Temperature growth of Silicon Oxide by Remote Plasma Atomic Layer Deposition using Bis(diethylamino)silane and O2 plasma
- Authors
- 전형탁
- Issue Date
- 16-Oct-2020
- Place
- 명지대 자연캠퍼스 창조예술관 5층
- Conference Name
- 2020년 온라인 추계학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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