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DC Bias에 의해 radical 효과가 극대화된 플라즈마 원자층 증착법으로 BDEAS 와 CO2 plasma로 증착된 고품질 SiO2 박막 High quality SiO2 film by radical improved DC bias PEALD using BDEAS and CO2 plasma
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 전형탁 | - |
| dc.date.accessioned | 2021-07-30T08:31:16Z | - |
| dc.date.available | 2021-07-30T08:31:16Z | - |
| dc.date.issued | 2020-10-16 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/7477 | - |
| dc.title | DC Bias에 의해 radical 효과가 극대화된 플라즈마 원자층 증착법으로 BDEAS 와 CO2 plasma로 증착된 고품질 SiO2 박막 High quality SiO2 film by radical improved DC bias PEALD using BDEAS and CO2 plasma | - |
| dc.type | Conference | - |
| dc.citation.conferenceName | 2020년 온라인 추계학술대회 | - |
| dc.citation.conferencePlace | 명지대 자연캠퍼스 창조예술관 5층 | - |
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