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The measurement of the electron energy distribution function in a inductively coupled plasma
- Authors
- 정진욱
- Issue Date
- 24-Oct-2003
- Publisher
- 한국물리학회
- Citation
- 물리학회
- Conference Name
- 물리학회
- Place
- 경북대학교
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)