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유도결합 플라즈마(ICP)를 이용한 Er 첨가된 광도파막 식각 특성 연구
- Authors
- 신동욱
- Issue Date
- 16-Apr-2004
- Publisher
- 한국 세라믹 학회
- Citation
- 한국 세라믹 학회
- Conference Name
- 한국 세라믹 학회
- Place
- 고려대학교
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- SHIN, DONG WOOK
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)