Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
SBM 공정을 이용한 단일 실리콘 기판상에 제작된 병렬형 2축 가속도계
- Authors
- 허건수
- Issue Date
- 28-Mar-2004
- Conference Name
- 한국 MEMS 학술대회
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - 서울 공과대학 > 서울 미래자동차공학과 > 2. Conference Papers
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.