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properties of si-based nanostructures fabricated by PECVD and UHV sputtering methods

Authors
홍진표
Issue Date
23-Sep-2003
URI
https://scholarworks.bwise.kr/hanyang/handle/2021.sw.hanyang/76196
Place
이화여대
Conference Name
The 10th Korea-china symposium on thin film materials
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서울 자연과학대학 > 서울 물리학과 > 2. Conference Papers

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