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On Electron Heating Mechanism in Low Pressure High Density Inductively Coupled Plasma (ICP)
- Authors
- 정진욱
- Issue Date
- 4-Jun-2003
- Place
- 제주 롯데 호텔
- Conference Name
- IEEE Plasma Science
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Collections - 서울 공과대학 > 서울 전기공학전공 > 2. Conference Papers
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Related Researcher
- Chung, Chin Wook
- COLLEGE OF ENGINEERING (MAJOR IN ELECTRICAL ENGINEERING)