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Electrical Characteristics of Ir/Atomic Layer Deposited ZrO2/Si field effect transistors
- Authors
- 전형탁
- Issue Date
- 2-Dec-2002
- Place
- Hynes Convention Center & Sheraton Boston Hotel and Towers , Boston Massachusetts
- Conference Name
- 2002 MRS Fall meeting
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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