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극자외선 노광공정용 Ru/Mo/Si 반사형 다층박막 미러의 증착에 관한 연구
- Authors
- 안진호
- Issue Date
- 20021101
- Place
- 배재대학교
- Conference Name
- 2002년도 한국재료학회 추계학술발표
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)