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향상된 단면 연마 실리콘 웨이퍼가 화학적 기계적 연마에서 나노토포그래피에 미치는 영향의 스펙트럼 분석
- Authors
- 백운규
- Issue Date
- 18-May-2002
- Place
- 한양대학교
- Conference Name
- 한국재료학회
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Collections - 서울 공과대학 > 서울 에너지공학과 > 2. Conference Papers
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Related Researcher
- Paik, Ungyu
- COLLEGE OF ENGINEERING (DEPARTMENT OF ENERGY ENGINEERING)