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Ru/Mo/Si 다층박막 구조를 가지는 노광공정용 반사형 다층박막 미러의 제조
- Authors
- 안진호
- Issue Date
- 20020503
- Place
- 경기대
- Conference Name
- 2002년도 한국마이크로전자 및 패키징 학회 춘계 기술 심포지움
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)