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Atomic Layer Deposition (ALD) of high-k gate oxide
- Authors
- 전형탁
- Issue Date
- 20020426
- Place
- 창원대학교
- Conference Name
- 2002 춘계 금속학회 학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)