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EUV 리소그라피용 마스크로서의 Mo/Ru/Si multilayer의 특성분석
- Authors
- 안진호
- Issue Date
- 20020218
- Place
- 무주리조트
- Conference Name
- 제11회 한국반도체 학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)