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SF6/Ar 플라즈마를 사용한 캐퍼시터 전극용 백금 박막의 식각 특성
- Authors
- 안진호
- Issue Date
- 2-Nov-2001
- Place
- 고려대학교
- Conference Name
- 001년도 한국재료학회 추계 학술발표강연
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)