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저온 원거리 플라즈마를 이용한 Si 기판의 유기오염물 제거
- Authors
- 전형탁
- Issue Date
- 20010427
- Place
- 연세대학교
- Conference Name
- 2001년도 봄 학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)