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Study on Low-k Polyimide Etching with SF6/O2 plasma
- Authors
- 안진호
- Issue Date
- 20010214
- Place
- COEX 컨벤션센터
- Conference Name
- 제 8회 한국 반도체학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)