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염소 플라즈마를 이용한 탄탈륨 미세패턴 식각 특성
- Authors
- 안진호
- Issue Date
- 20001103
- Place
- 서울대
- Conference Name
- 한국재료학회 추계 학술발표강연
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)