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Off-axis Si(100) 기판에서의 화학적 산화막을 이용한 Co-sillicide 성장에 관한 연구
- Authors
- 전형탁
- Issue Date
- 20000126
- Place
- 고려대학교
- Conference Name
- 제7회 한국 반도체 학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)