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고밀도 플라즈마를 이용한 다층 금속 박막층의 식각 특성 연구
- Authors
- 안진호
- Issue Date
- 19981101
- Conference Name
- 한국 재료학회 추계학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)