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Electromigration Study of Al Thin FilmsDeposited on Low Dielectric Polyimide and SiO2 ILD
- Authors
- 김영호
- Issue Date
- 1-Aug-1998
- Publisher
- 한국재료학회
- Citation
- IUMRS-ICEM-98
- Conference Name
- IUMRS-ICEM-98
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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