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화학적 산화막에 의한 Si(100)와 Si(111)기판위에서의 CoSi2정합 성장
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- 전형탁
- Issue Date
- 1-May-1998
- Conference Name
- 한국재료학회 춘계 학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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