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TiN diffusion barrier formation by pulsed source chemical vapor deposition method
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- 전형탁
- Issue Date
- 19980401
- Conference Name
- MRS Symposium
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Jeon, Hyeongtag
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)