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Deposition of low stress,high transmittance SiC as an x-ray mask membrane usingECR plasma CVD
- Authors
- 안진호
- Issue Date
- 1-Feb-1998
- Conference Name
- 제 5회 한국 반도체 학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Ahn, Jinho
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)