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A Study on the Etching Process Conditions for Improving Vertical Profile of 3-D NAND Flash Channel Hole
- Authors
- 송윤흡
- Issue Date
- 19-Aug-2020
- Place
- 제주롯데호텔
- Conference Name
- 대한전자공학회 하계학술대회
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Collections - 서울 공과대학 > 서울 융합전자공학부 > 2. Conference Papers
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Related Researcher
- Song, Yun Heub
- COLLEGE OF ENGINEERING (SCHOOL OF ELECTRONIC ENGINEERING)