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HKMG 소자 적용을 위한 원자층 증착 방식의 TaN 박막 형성 및 분석
- Authors
- 최창환
- Issue Date
- 17-Jul-2020
- Place
- Virtual Conference
- Conference Name
- 대한금속재료학회 춘계학술대회
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Collections - 서울 공과대학 > 서울 신소재공학부 > 2. Conference Papers
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Related Researcher
- Choi, Chang hwan
- COLLEGE OF ENGINEERING (SCHOOL OF MATERIALS SCIENCE AND ENGINEERING)