Yook, Se-Jin; Fissan, Heinz; Engelke, Thomas; Asbach, Christof; van der Zwaag, Till; Kim, Jung Hyeun; Eschbach, Florence; Wang, Jing; Pui, David Y. H.
ArticleIssue Date2008CitationIEEE TRANSACTIONS ON SEMICONDUCTOR MANUFACTURING, v.21, no.2, pp.238 - 243PublisherIEEE-INST ELECTRICAL ELECTRONICS ENGINEERS INC