Chang, G.S.; Jung, S.M.; Song, J.H.; Kim, H.B.; Woo, J.J.; Byun, D.H.; Whang, C.N.
ArticleIssue Date1997CitationNuclear Instruments and Methods in Physics Research, Section B: Beam Interactions with Materials and Atoms, v.121, no.1-4, pp.244 - 250PublisherElsevier