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Atomic Layer Deposition of Al2O3 with Alcohol Oxidants for Impeding Substrate Oxidation
- Authors
- 송봉근
- Issue Date
- 16-Oct-2019
- Publisher
- ECS
- Citation
- ECS meeting abstracts, v.0, no.0, pp.0 - 0
- Journal Title
- ECS meeting abstracts
- Volume
- 0
- Number
- 0
- Start Page
- 0
- End Page
- 0
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Collections - College of Engineering > Chemical Engineering Major > 1. Journal Articles
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Related Researcher
- Shong, Bong geun
- Engineering (Chemical Engineering)