Detailed Information
Cited 0 time in 
Cited 0 time in 
Cited 0 time in
Metadata Downloads
DFT Study on Atomic Layer Deposition of Al2O3 with Various Oxidants
- Authors
- 송봉근
- Issue Date
- 22-Jul-2019
- Publisher
- American Vacuum Society
- Citation
- ALD 2019, v.0, no.0, pp.0 - 0
- Journal Title
- ALD 2019
- Volume
- 0
- Number
- 0
- Start Page
- 0
- End Page
- 0
- Files in This Item
- There are no files associated with this item.
- Appears in
Collections - College of Engineering > Chemical Engineering Major > 1. Journal Articles
Items in ScholarWorks are protected by copyright, with all rights reserved, unless otherwise indicated.
Related Researcher
- Shong, Bong geun
- Engineering (Chemical Engineering)