Effect of Computational Lithography Parameters on the Organic Light-Emitting Diodes

Abstract

For the high efficiency of the small-size display and the increasing complexity of layer composition and structures in the organic light-emitting devices (OLEDs), a validated comprehensive OLED device modeling is required. In this paper, a technology computer-aided design (TCAD) of OLED is efficiently modeled to integrate the whole physical processes in OLED fabrication. For the micro-/nano-lens array with diffraction limits, a method of the enhanced outcoupled efficiency of OLED, the rectangular block-lens, not only enhances the light extraction of 11% but also lowers the driving voltage of 8% than the hemisphere-lens because of the reduction of the significant chromatic dependence and the pixel-to-pixel optical crosstalk. Simulation results can optimize parameters of lithography process and OLED fabrication for the OLED performance and thereby improve the external quantum efficiency.