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Results 1-2 of 2 (Search time: 0.003 seconds).
Contact Hole Shrinking of Directed Self-Assembly and Its Application Based on Simulation Approach
Kim, Sang-Kon
Article
Issue Date
2015
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.15, no.10, pp.8183 - 8186
Publisher
AMER SCIENTIFIC PUBLISHERS
Impact of process parameters on pattern formation in the maskless plasmonic computational lithography
Kim, Sang-Kon
Article
Issue Date
2015
Citation
CURRENT APPLIED PHYSICS, v.15, no.6, pp.698 - 702
Publisher
ELSEVIER SCIENCE BV
1
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Subject
Lithography
2
BCP
1
Block Copolymer
1
DIBLOCK COPOLYMERS
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Diffraction limit
1
Directed Self-Assembly
1
DSA
1
Lithography Simulation
1
Lithography simulation
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Metamaterials
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Current Applied Physics
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Journal of Nanoscience and Nanote...
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