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Results 1-2 of 2 (Search time: 0.004 seconds).
Effect of Computational Lithography Parameters on the Organic Light-Emitting Diodes
Kim, Sang-Kon
Article
Issue Date
2016
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.16, no.8, pp.8496 - 8499
Publisher
AMER SCIENTIFIC PUBLISHERS
Effects of Line-Edge Roughness on Extreme Ultraviolet Lithography CDs and Fin-Field-Effect-Transistor Performance for Below 10-nm Patterns
Kim, Sang-Kon
Article
Issue Date
2017
Citation
JOURNAL OF NANOSCIENCE AND NANOTECHNOLOGY, v.17, no.11, pp.8338 - 8343
Publisher
AMER SCIENTIFIC PUBLISHERS
1
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Author
kim, sang-kon
2
Subject
Lithography
2
Coupling Efficiency
1
EUV
1
EXTERNAL-QUANTUM-EFFICIENCY
1
EXTRACTION
1
FinFET
1
LER
1
Line Edge Roughness
1
Microlens Array
1
OLED
1
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