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The Relationship between the Pi-coefficient and the Temperature for the (111) Silicon Surface
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | Cho, Chun-Hyung | - |
| dc.date.accessioned | 2021-11-11T03:43:40Z | - |
| dc.date.available | 2021-11-11T03:43:40Z | - |
| dc.date.created | 2021-11-10 | - |
| dc.date.issued | 2013-11 | - |
| dc.identifier.issn | 0374-4884 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/17018 | - |
| dc.description.abstract | In this work, we performed an extensive experimental study on temperature dependence of the piezoresistive behavior of silicon. For the precise measurement of stress, we derived the expressions for the relationship between the pi-coefficients versus temperature. Also, the relationship was observed to be in good agreement with the calibration results over the temperature range -133 to 100 degrees C for test chips fabricated on the (111) silicon surface. | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | KOREAN PHYSICAL SOC | - |
| dc.subject | PIEZORESISTIVE COEFFICIENTS | - |
| dc.subject | DEPENDENCE | - |
| dc.title | The Relationship between the Pi-coefficient and the Temperature for the (111) Silicon Surface | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Cho, Chun-Hyung | - |
| dc.identifier.doi | 10.3938/jkps.63.2029 | - |
| dc.identifier.scopusid | 2-s2.0-84891064663 | - |
| dc.identifier.wosid | 000328207500029 | - |
| dc.identifier.bibliographicCitation | JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.63, no.10, pp.2029 - 2033 | - |
| dc.relation.isPartOf | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
| dc.citation.title | JOURNAL OF THE KOREAN PHYSICAL SOCIETY | - |
| dc.citation.volume | 63 | - |
| dc.citation.number | 10 | - |
| dc.citation.startPage | 2029 | - |
| dc.citation.endPage | 2033 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Article | - |
| dc.identifier.kciid | ART001844754 | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.description.journalRegisteredClass | kci | - |
| dc.relation.journalResearchArea | Physics | - |
| dc.relation.journalWebOfScienceCategory | Physics, Multidisciplinary | - |
| dc.subject.keywordPlus | PIEZORESISTIVE COEFFICIENTS | - |
| dc.subject.keywordPlus | DEPENDENCE | - |
| dc.subject.keywordAuthor | Pi-coefficients versus temperature | - |
| dc.subject.keywordAuthor | Stress sensor | - |
| dc.subject.keywordAuthor | (111) silicon | - |
| dc.subject.keywordAuthor | TCR measurements | - |
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Related Researcher
- Cho, Chun Hyung
- Science & Technology (Department of Electronic & Electrical Convergence Engineering)