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Impedance Spectroscopy Characterization in Bipolar Ta/MnOx/Pt Resistive Switching Thin Films

Authors
Park, Chan-RokChoi, Sun-YoungYou, Yil-HwanYang, Min KyuBae, Seung-MukLee, Jeon-KookHwang, Jin-Ha
Issue Date
Apr-2013
Publisher
WILEY
Citation
JOURNAL OF THE AMERICAN CERAMIC SOCIETY, v.96, no.4, pp.1234 - 1239
Journal Title
JOURNAL OF THE AMERICAN CERAMIC SOCIETY
Volume
96
Number
4
Start Page
1234
End Page
1239
URI
https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/17158
DOI
10.1111/jace.12185
ISSN
0002-7820
Abstract
Impedance spectroscopy was applied to MnOx-based thin films prepared in symmetric and asymmetric electrode configurations, i.e., Pt/MnOx/Pt and Ta/MnOx/Pt, respectively. Equivalent circuit analysis suggests the presence of higher resistance surface layers adjacent the electrodes, in addition to a higher conductivity component at central portions of the MnOx thin films. The asymmetric configuration enables the Ta/MnOx interfacial layer to facilitate the redox transport of oxygen ions, where significant changes in resistance with the electric field are responsible for the higher on/off resistance ratio in Ta/MnOx/Pt. The higher dielectric constant and bias-dependent capacitance and resistance support the coexistence of both oxidized surfaces and interfacial layers.
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