Thermal degradation of Ohmic contacts on semipolar (11-22) GaN films grown on m-plane (1-100) sapphire substrates
- Authors
- Kim, Doo Soo; Kim, Deuk Young; Seo, Yong Gon; Kim, Ji Hoon; Hwang, Sung-Min; Baik, Kwang Hyeon
- Issue Date
- Oct-2012
- Publisher
- KOREAN PHYSICAL SOC
- Keywords
- Semipolar; GaN; XRD; Ohmic; m-plane sapphire
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.61, no.7, pp.1060 - 1064
- Journal Title
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Volume
- 61
- Number
- 7
- Start Page
- 1060
- End Page
- 1064
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/18891
- DOI
- 10.3938/jkps.61.1060
- ISSN
- 0374-4884
- Abstract
- Semipolar (11-22) GaN films were grown on m-plane (1-100) sapphire substrates by using metal-organic chemical vapor deposition. The linewidths of the omega rocking curves of the semipolar GaN films were 498 arcsec along the [11-23](GaN) direction and 908 arcsec along the [10-10](GaN) direction. The properties of the Ti/Al/Ni/Au metal contact were investigated using transmission-line-method patterns oriented in both the [11-23](GaN) and the [10-10](GaN) directions of semipolar (11-22) GaN. The minimum specific contact resistance of similar to 3.6 x 10(-4) Omega center dot cm(-2) was obtained on as-deposited metal contacts. The Ohmic contact properties of semipolar (11-22) GaN became degraded with increasing annealing temperature above 400 A degrees C. The thermal degradation of the metal contacts may be attributed to the surface property of N-polarity on the semipolar (11-22) GaN films. Also, the semipolar (11-22) GaN films did not show clear anisotropic behavior of the electrical properties for different azimuthal angles.
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