Electrical Characterization of Electronic Materials Using FIB-assisted NanomanipulatorsElectrical Characterization of Electronic Materials Using FIB-assisted Nanomanipulators
- Other Titles
- Electrical Characterization of Electronic Materials Using FIB-assisted Nanomanipulators
- Authors
- 노재홍; 유일환; 안재평; 황진하
- Issue Date
- 2012
- Publisher
- 한국현미경학회
- Keywords
- Focused ion beam; Nanomanipulators; Spreading resistance; Electrode configuration
- Citation
- 한국현미경학회지, v.42, no.4, pp.223 - 227
- Journal Title
- 한국현미경학회지
- Volume
- 42
- Number
- 4
- Start Page
- 223
- End Page
- 227
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/19250
- ISSN
- 2287-5123
- Abstract
- Focused Ion Beam (FIB) systems have incorporated versatile nanomanipulators with inherent sophisticated machining capability to characterize the electrical properties of highly miniature components of electronic devices. Carbon fibers were chosen as a model system to test the applicability of nanomanipulators to microscale electronic materials, with special emphasis on the direct current current-voltage characterizations in terms of electrode confi guration. The presence of contact resistance affects the electrical characterization. This resistance originates from either i) the so-called “spreading resistance” due to the geometrical constriction near the electrode - material interface or ii)resistive surface layers. An appropriate electrode strategy is proposed herein for the use of FIB-based manipulators.
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Collections - College of Engineering > Materials Science and Engineering Major > 1. Journal Articles
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