Electrical Characterization of Electronic Materials Using FIB-assisted Nanomanipulators

Abstract

Focused Ion Beam (FIB) systems have incorporated versatile nanomanipulators with inherent sophisticated machining capability to characterize the electrical properties of highly miniature components of electronic devices. Carbon fibers were chosen as a model system to test the applicability of nanomanipulators to microscale electronic materials, with special emphasis on the direct current current-voltage characterizations in terms of electrode confi guration. The presence of contact resistance affects the electrical characterization. This resistance originates from either i) the so-called “spreading resistance” due to the geometrical constriction near the electrode - material interface or ii)resistive surface layers. An appropriate electrode strategy is proposed herein for the use of FIB-based manipulators.