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A comparative study on the adsorption of silicon tetrahalides toward low-temperature thermal atomic layer deposition of silicon nitride
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | 송봉근 | - |
| dc.date.available | 2020-07-10T04:01:30Z | - |
| dc.date.created | 2020-07-08 | - |
| dc.date.issued | 2019-02-14 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/1932 | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | 한국반도체학술대회 | - |
| dc.title | A comparative study on the adsorption of silicon tetrahalides toward low-temperature thermal atomic layer deposition of silicon nitride | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | 송봉근 | - |
| dc.identifier.bibliographicCitation | 한국반도체학술대회, v.0, no.0, pp.0 - 0 | - |
| dc.relation.isPartOf | 한국반도체학술대회 | - |
| dc.citation.title | 한국반도체학술대회 | - |
| dc.citation.volume | 0 | - |
| dc.citation.number | 0 | - |
| dc.citation.startPage | 0 | - |
| dc.citation.endPage | 0 | - |
| dc.type.rims | ART | - |
| dc.description.journalClass | 2 | - |
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Related Researcher
- Shong, Bong geun
- Engineering (Chemical Engineering)