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A comparative study on the adsorption of silicon tetrahalides toward low-temperature thermal atomic layer deposition of silicon nitride
- Authors
- 송봉근
- Issue Date
- 14-Feb-2019
- Publisher
- 한국반도체학술대회
- Citation
- 한국반도체학술대회, v.0, no.0, pp.0 - 0
- Journal Title
- 한국반도체학술대회
- Volume
- 0
- Number
- 0
- Start Page
- 0
- End Page
- 0
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Collections - College of Engineering > Chemical Engineering Major > 1. Journal Articles
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Related Researcher
- Shong, Bong geun
- Engineering (Chemical Engineering)