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Joule-heating induced crystallization for AMOLED TFT-backplanes

Authors
Hong, W.-E.Jang, I.Jun, C.-S.Park, D.J.Kim, C.S.Lee, W.P.Kim, H.D.Ro, J.-S.
Issue Date
2010
Keywords
AMOLED; Crystallization; Joule-heating; LTPS; TFTs
Citation
Proceedings of International Meeting on Information Display, pp.44 - 45
Journal Title
Proceedings of International Meeting on Information Display
Start Page
44
End Page
45
URI
https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/21665
ISSN
1738-7558
Abstract
A Mo-layer used as a gate electrode was employed as a conductive layer for Joule-heating induced crystallization of patterned active islands of amorphous films. High performance JIC poly-Si TFTs were fabricated using an optimized processing suggested in this work compatible to mass production of AMOLED panels.
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