RF 마그네트론 스퍼터링을 이용한 태양전지용 질화 실리콘 반사방지막Anti-reflection Coating of Silicon Nitride Film for Solar Cell by RF Magnetron Sputtering
- Other Titles
- Anti-reflection Coating of Silicon Nitride Film for Solar Cell by RF Magnetron Sputtering
- Authors
- 최균; 최의석; 황진하; 이수홍
- Issue Date
- 2007
- Publisher
- 한국세라믹학회
- Keywords
- AR coating (anti-reflection coating); Silicon nitride; Solar cell; RF magnetron sputtering
- Citation
- 한국세라믹학회지, v.44, no.10, pp.585 - 588
- Journal Title
- 한국세라믹학회지
- Volume
- 44
- Number
- 10
- Start Page
- 585
- End Page
- 588
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/23810
- ISSN
- 1229-7801
- Abstract
- Silicon nitride films for an anti-reflection coating were deposited on silicon via RF magnetron sputtering using a Si3N4 target. The
best result was obtained at the sputtering condition of 340W RF power, 5 mtorr Ar atmosphere, 100
o
C substrate temperature. The
films showed 7.9% reflectance minimum with 2.35 refractive index, 0.21 absorption coefficient at 66.6 nm thickness. The surface
morphology showed a smooth and dense film with good adhesion to silicon surface.
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Collections - College of Engineering > Materials Science and Engineering Major > 1. Journal Articles
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