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대기압 플라즈마 발생용 마이크로 전극 제작 및 저전압 동작 특성Stable Atmospheric Plasma Generation at a Low Voltage using a Microstructure Array
- Other Titles
- Stable Atmospheric Plasma Generation at a Low Voltage using a Microstructure Array
- Issue Date
- 2007
- Publisher
- 대한전기학회
- Keywords
- MEMS(멤스); Electroplating(전기도금); Self-aligned(자가정렬); Discharge(방전); Plasma(플라즈마)1. 서 론†교신저자; 正會員 : 弘益大 大學院 電氣情報制御工學科 碩士課程E-mail : jaehyeokkim@gmail.com* 正 會 員 : 三星電子 半導體總括
- Citation
- 전기학회논문지ABCD, v.56, no.4, pp.773 - 776
- Journal Title
- 전기학회논문지ABCD
- Volume
- 56
- Number
- 4
- Start Page
- 773
- End Page
- 776
- ISSN
- 1229-2443
- Abstract
- - A microstructure array has been proposed for micro plasma generation using electroplating and double exposed process. A stable atmospheric plasma has been generated at a low voltage by utilizing the micro electrode gap. Self-aligned microstructure can provide uniform electrode overlap with precisely controlled gap between the electrodes. The proposed structure allows for triode operation, which can expand the generated plasma over a large area by applying a lateral electric field. Electrical characteristics of the micro triode confirm the large numbers of the plasma ions are drifted to the secondary cathode by the lateral electrical field.
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Related Researcher
- Kim, Young min
- Engineering (Electronic & Electrical Engineering)