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Development of rapid thermal processor for large-glass LTPS production
- Authors
- Shin, Dong Hoon; Kim, Hyoung-June
- Issue Date
- 2007
- Publisher
- WILEY
- Keywords
- field-enhanced RTP; active-matrix organic light-emitting diode; low-temperature poly-crystalline-silicon LCD
- Citation
- JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY, v.15, no.5, pp.293 - 296
- Journal Title
- JOURNAL OF THE SOCIETY FOR INFORMATION DISPLAY
- Volume
- 15
- Number
- 5
- Start Page
- 293
- End Page
- 296
- ISSN
- 1071-0922
- Abstract
- A field-enhanced rapid-thermal-processor (FE-RTP) system that enables LTPS LCD and AMOLED manufacturers to produce poly-Si films at low cost, high throughput, and high yield has been developed. The FE-RTP allows for diverse process options including crystallization, thermal oxidation of gate oxides, and fast pre-compactions. The process and equipment compatibility with a-Si TFT manufacturing lines provides a viable solution to produce poly-Si TFTs using a-Si TFT lines.
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