Al과 Ni를 이용한 비정질 실리콘의 결정화 거동
DC Field | Value | Language |
---|---|---|
dc.contributor.author | 권순규 | - |
dc.contributor.author | 최균 | - |
dc.contributor.author | 김병익 | - |
dc.contributor.author | 황진하 | - |
dc.date.accessioned | 2022-02-07T06:45:20Z | - |
dc.date.available | 2022-02-07T06:45:20Z | - |
dc.date.created | 2022-02-07 | - |
dc.date.issued | 2006 | - |
dc.identifier.issn | 1229-7801 | - |
dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/24930 | - |
dc.description.abstract | Metal-induced crystallization (MIC) of amourphous silicon (a-Si) using aluminum and nickel as catalysts were performed with a variation of metal thickness and temperature. Raman results showed that the crystallization of a-Si depended on the thickness of aluminum while not on nickel. Nickel that forms silicide nodules during annealing simply catalyzed the formation of crystalline silicon (c-Si) while aluminum was consumed and transferred during MIC, which resulted in more complex microstructural characteristics. Crystalline silicons after NIC had elongated shape with a twin along the long axis. Morphological change after aluminum-induced crystallization (AIC) showed more equiaxial grains. The nucleation and growth mechanism of AIC was discussed. | - |
dc.publisher | 한국세라믹학회 | - |
dc.title | Al과 Ni를 이용한 비정질 실리콘의 결정화 거동 | - |
dc.title.alternative | Crystallization behavior of Amorphous Silicon with Al and Ni | - |
dc.type | Article | - |
dc.contributor.affiliatedAuthor | 황진하 | - |
dc.identifier.bibliographicCitation | 한국세라믹학회지, v.43, no.4, pp.7 - 7 | - |
dc.relation.isPartOf | 한국세라믹학회지 | - |
dc.citation.title | 한국세라믹학회지 | - |
dc.citation.volume | 43 | - |
dc.citation.number | 4 | - |
dc.citation.startPage | 7 | - |
dc.citation.endPage | 7 | - |
dc.type.rims | ART | - |
dc.identifier.kciid | ART001096290 | - |
dc.description.journalClass | 2 | - |
dc.description.journalRegisteredClass | kci | - |
dc.subject.keywordAuthor | MIC | - |
dc.subject.keywordAuthor | AIC | - |
dc.subject.keywordAuthor | metal-induced | - |
dc.subject.keywordAuthor | crystallization | - |
dc.subject.keywordAuthor | MIC | - |
dc.subject.keywordAuthor | AIC | - |
dc.subject.keywordAuthor | metal-induced | - |
dc.subject.keywordAuthor | crystallization | - |
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