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A new top gate pentacene organic thin film transistor employing vapor deposited polyimide as a gate dielectric

Authors
Han, C.W.Park, S.-G.Kim, C.-Y.Han, M.-K.Hyung, G.-W.Lee, D.-H.Pyo, S.-W.Kim, Y.K.
Issue Date
2006
Publisher
Materials Research Society
Citation
Materials Research Society Symposium Proceedings, v.937, pp.137 - 142
Journal Title
Materials Research Society Symposium Proceedings
Volume
937
Start Page
137
End Page
142
URI
https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/25034
DOI
10.1557/proc-0937-m10-51
ISSN
0272-9172
Abstract
A top gate pentacene TFT employing vapor deposited polyimide as a gate dielectric was fabricated. Polyimide was co-evaporated from 6FDA and ODA monomers and annealed at 150 °C in vacuum. The degree of imidization was verified by FT-IR. A breakdown voltage of 0.9 MV/cm of polyimide film was measured by MIM structure. A top gate pentacene TFT with W/L=25 has 0.01 cm 2/Vs as a mobility, about 103 as an on-off ratio (I on/off), -7.5V as a threshold voltage and 9 V per decade as a sub-threshold slope. © 2006 Materials Research Society.
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