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Electrical/optical properties of thin transparent oxide films deposited using DC magnetron sputtering.
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| DC Field | Value | Language |
|---|---|---|
| dc.contributor.author | So, BS | - |
| dc.contributor.author | Kim, SM | - |
| dc.contributor.author | Pyo, YS | - |
| dc.contributor.author | Kim, YH | - |
| dc.contributor.author | Hwang, JH | - |
| dc.date.accessioned | 2022-02-18T07:42:59Z | - |
| dc.date.available | 2022-02-18T07:42:59Z | - |
| dc.date.created | 2022-02-18 | - |
| dc.date.issued | 2004 | - |
| dc.identifier.issn | 0255-5476 | - |
| dc.identifier.uri | https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/25832 | - |
| dc.description.abstract | Amorphous indium. tin oxide (ITO) thin films were grown on plastic substrates, PES (polyethersulfone) using low temperature DC magnetron sputtering. Various post-annealing techniques are attempted to optimize conductivity, transmittance, and roughness: i) conventional thermal annealing, ii) excimer laser annealing, and iii) UV irradiation. The electrical/optical properties were measured using Hall-measurement, DC 4-point resistance measurement, and UV spectrometry along with micro-structural characterization. Optimized UV treatment exhibits enhanced conductivity and smooth surface, compared to those of conventional thermal annealing and excimer laser annealing. | - |
| dc.language | 영어 | - |
| dc.language.iso | en | - |
| dc.publisher | TRANS TECH PUBLICATIONS LTD | - |
| dc.subject | INDIUM-TIN-OXIDE | - |
| dc.subject | CONDUCTING FILMS | - |
| dc.subject | CRYSTALLIZATION | - |
| dc.title | Electrical/optical properties of thin transparent oxide films deposited using DC magnetron sputtering. | - |
| dc.type | Article | - |
| dc.contributor.affiliatedAuthor | Hwang, JH | - |
| dc.identifier.doi | 10.4028/www.scientific.net/MSF.449-452.989 | - |
| dc.identifier.scopusid | 2-s2.0-18744425543 | - |
| dc.identifier.wosid | 000189492000244 | - |
| dc.identifier.bibliographicCitation | DESIGNING, PROCESSING AND PROPERTIES OF ADVANCED ENGINEERING MATERIALS, PTS 1 AND 2, v.449-4, pp.989 - 992 | - |
| dc.relation.isPartOf | DESIGNING, PROCESSING AND PROPERTIES OF ADVANCED ENGINEERING MATERIALS, PTS 1 AND 2 | - |
| dc.citation.title | DESIGNING, PROCESSING AND PROPERTIES OF ADVANCED ENGINEERING MATERIALS, PTS 1 AND 2 | - |
| dc.citation.volume | 449-4 | - |
| dc.citation.startPage | 989 | - |
| dc.citation.endPage | 992 | - |
| dc.type.rims | ART | - |
| dc.type.docType | Article; Proceedings Paper | - |
| dc.description.journalClass | 1 | - |
| dc.description.journalRegisteredClass | scie | - |
| dc.description.journalRegisteredClass | scopus | - |
| dc.relation.journalResearchArea | Materials Science | - |
| dc.relation.journalResearchArea | Metallurgy & Metallurgical Engineering | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Ceramics | - |
| dc.relation.journalWebOfScienceCategory | Materials Science, Multidisciplinary | - |
| dc.relation.journalWebOfScienceCategory | Metallurgy & Metallurgical Engineering | - |
| dc.subject.keywordPlus | INDIUM-TIN-OXIDE | - |
| dc.subject.keywordPlus | CONDUCTING FILMS | - |
| dc.subject.keywordPlus | CRYSTALLIZATION | - |
| dc.subject.keywordAuthor | ITO | - |
| dc.subject.keywordAuthor | electrical | - |
| dc.subject.keywordAuthor | optical | - |
| dc.subject.keywordAuthor | transmission | - |
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Related Researcher
- Hwang, Jin ha
- Engineering (Advanced Materials)