Electrical/optical properties of thin transparent oxide films deposited using DC magnetron sputtering.
- Authors
- So, BS; Kim, SM; Pyo, YS; Kim, YH; Hwang, JH
- Issue Date
- 2004
- Publisher
- TRANS TECH PUBLICATIONS LTD
- Keywords
- ITO; electrical; optical; transmission
- Citation
- DESIGNING, PROCESSING AND PROPERTIES OF ADVANCED ENGINEERING MATERIALS, PTS 1 AND 2, v.449-4, pp.989 - 992
- Journal Title
- DESIGNING, PROCESSING AND PROPERTIES OF ADVANCED ENGINEERING MATERIALS, PTS 1 AND 2
- Volume
- 449-4
- Start Page
- 989
- End Page
- 992
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/25832
- DOI
- 10.4028/www.scientific.net/MSF.449-452.989
- ISSN
- 0255-5476
- Abstract
- Amorphous indium. tin oxide (ITO) thin films were grown on plastic substrates, PES (polyethersulfone) using low temperature DC magnetron sputtering. Various post-annealing techniques are attempted to optimize conductivity, transmittance, and roughness: i) conventional thermal annealing, ii) excimer laser annealing, and iii) UV irradiation. The electrical/optical properties were measured using Hall-measurement, DC 4-point resistance measurement, and UV spectrometry along with micro-structural characterization. Optimized UV treatment exhibits enhanced conductivity and smooth surface, compared to those of conventional thermal annealing and excimer laser annealing.
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Collections - College of Engineering > Materials Science and Engineering Major > 1. Journal Articles
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