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Excimer laser crystallization of a-ITO thin film deposited on plastics
- Issue Date
- Jun-2003
- Publisher
- KOREAN PHYSICAL SOC
- Keywords
- poly-crystalline ITO
- Citation
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY, v.42, no.6, pp.814 - 816
- Journal Title
- JOURNAL OF THE KOREAN PHYSICAL SOCIETY
- Volume
- 42
- Number
- 6
- Start Page
- 814
- End Page
- 816
- ISSN
- 0374-4884
- Abstract
- We propose a novel method to fabricate poly-crystalline Indium Tin Oxide (ITO) films on plastic 2 substrates by using XeCl excimer laser irradiation at on energy density of more than 60 mJ/cm(2) The crystallization behavior as a function of the energy density was investigated though X-ray diffraction (XRD) and Field Emission Scanning Electron Micorscopy (FESEM) analyses. The electrical resistivity of irradiated ITO thin films decreased from 6.75 Ohmcm to 3.30 Ohmcm. It was also observed that the substrate heating during irradiation and variations of the shot number had no significant effect on the electrical resistivity.
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Related Researcher
- Lee, Jae Ho
- Engineering (Advanced Materials)