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Fabrication of RF inductor using patterned FeTaN soft magnetic films
- Authors
- Bae, S.; Shin, D.-H.; Kim, C.-S.; Ryu, S.-R.; Nam, S.-E.; Song, J.-S.; Yamaguchi, M.; Kim, H.-J.
- Issue Date
- 2002
- Citation
- Digests of the Intermag Conference
- Journal Title
- Digests of the Intermag Conference
- ISSN
- 0074-6843
- Abstract
- The fabrication of radio frequency (RF) inductor was discussed using patterned FeTaN soft magnetic films. FeTaN nanocrystalline films as a part of magnetic layer showed good soft magnetic properties as well as high magnetization saturation. The RF inductor combine patterned FeTaN film was fabricated.
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