Fabrication of thin film inductors using FeTaN soft magnetic films
- Authors
- Lee, CH; Shin, DH; Ahn, DH; Nam, SE; Kim, HJ
- Issue Date
- 15-Apr-1999
- Publisher
- AMER INST PHYSICS
- Citation
- JOURNAL OF APPLIED PHYSICS, v.85, no.8, pp.4898 - 4900
- Journal Title
- JOURNAL OF APPLIED PHYSICS
- Volume
- 85
- Number
- 8
- Start Page
- 4898
- End Page
- 4900
- URI
- https://scholarworks.bwise.kr/hongik/handle/2020.sw.hongik/27602
- DOI
- 10.1063/1.369135
- ISSN
- 0021-8979
- Abstract
- Planar-type thin film inductors were fabricated using FeTaN soft magnetic films. It was found that excellent soft magnetic properties (coercivity of 0.1-0.2 Oe, effective permeability of 4000, and saturation magnetization of 15 kG) could be obtained in the Fe78.8Ta8.5N12.7 films after anneals at 400-500 degrees C. The initial permeability of the films was constant up to 20 MHz. Internal-coil inductors, in which Cu coils were sandwiched by SiO2 insulator/FeTaN magnetic layers, were fabricated and their characteristics were compared with air-core inductors. The inductance was increased by a factor of 4 compared to air-core inductors. However, the high frequency characteristic was degraded due to a frequency-limited permeability of FeTaN magnetic layers. (C) 1999 American Institute of Physics. [S0021-8979(99)61508-0].
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Collections - College of Engineering > Materials Science and Engineering Major > 1. Journal Articles
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